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template tekst – Scanning Electron Microscopy (SEM) is a method where a focussed beam of electrons is scanned over the sample surface. The recorded signal is scanned onto a screen or into a digital image. A conventional SEM requires a high vacuum sample chamber, where the electron bundle interacts with the sample. Low Vacuum and environmental SEM instruments are available as well.

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extra tekst Several types of electron sources have been developed to deliver optimal imaging results, either in costs or in image resolution. Different types of signals are generated by the electron bundle, of which the most used are mentioned here:

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